Review of advances in cubic boron nitride film synthesis
نویسندگان
چکیده
منابع مشابه
Synthesis of Boron-Aluminum Nitride Thin Film by Chemical Vapour Deposition Using Gas Bubbler
Boron included aluminium nitride (B-AlN) thin films were synthesized on silicon (Si) substrates through chemical vapour deposition ( CVD ) at 773 K (500 °C). tert-buthylamine (tBuNH2) solution was used as nitrogen source and delivered through gas bubbler. B-AlN thin films were prepared on Si-100 substrates by varying gas mixture ratio of three precursors. The structural properties of the films ...
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Jin S. Zhang, Jay D. Bass, Takashi Taniguchi, Alexander F. Goncharov, Yun-Yuan Chang, and Steven D. Jacobsen Department of Geology, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan Geophysical Laboratory, Carnegie Institution of Washington, Washington D.C. 20015, USA Department of Earth...
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ژورنال
عنوان ژورنال: Materials Science and Engineering: R: Reports
سال: 1997
ISSN: 0927-796X
DOI: 10.1016/s0927-796x(97)00009-0